Development of SiC/MgO distributed bragg reflector using RF magnetron sputtering technique

M. S. Khairul Anuar; Hariyadi Soetedjo; A. Mohd Sharizal; S. M. Sufian; T. Goh Boon; R. Richard; A. R. Saadah; Y. Mohamed Razman; A. M. Abdul Fatah

doi:10.1109/SMELEC.2006.381085

Development of SiC/MgO distributed bragg reflector using RF magnetron sputtering technique

M. S. Khairul Anuar^*, Hariyadi Soetedjo, A. Mohd Sharizal, S. M. Sufian, T. Goh Boon, R. Richard, A. R. Saadah, Y. Mohamed Razman, A. M. Abdul Fatah

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Scopus citations

Abstract

A Bragg mirror structure is an essential part for vertical cavity surface emission laser (VCSEL) applications. High optical reflectance at required stopband width is one of major concern by means of application requirements. For this purpose, Bragg mirrors consisting of SiC/MgO multilayers have been developed using an RF magnetron sputtering technique at room temperature. These structures have been characterized using various measurement techniques like ellipsometry, reflectance spectroscopy, Fourier transform infrared (FTIR) spectroscopy, scanning electron microscopy (SEM) and X-ray diffraction (XRD) technique. From these measurements, it was confirmed that mirror materials were deposited on the substrates. For application requirement, the DBR mirror structure fabricated using only a seven period SiC/MgO multilayered structure produced the expected stop-band at 850 nm wavelength with high reflectivity of 95%.

Original language	English (US)
Title of host publication	ICSE 2006
Subtitle of host publication	2006 IEEE International Conference on Semiconductor Electronics, Proceedings
Pages	378-381
Number of pages	4
DOIs	https://doi.org/10.1109/SMELEC.2006.381085
State	Published - 2006
Externally published	Yes
Event	2006 IEEE International Conference on Semiconductor Electronics, ICSE 2006 - Kuala Lumpur, Malaysia Duration: Nov 29 2006 → Dec 1 2006

Publication series

Name	IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE

Other

Other	2006 IEEE International Conference on Semiconductor Electronics, ICSE 2006
Country/Territory	Malaysia
City	Kuala Lumpur
Period	11/29/06 → 12/1/06

ASJC Scopus subject areas

General Engineering

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10.1109/SMELEC.2006.381085

Cite this

Khairul Anuar, M. S., Soetedjo, H., Mohd Sharizal, A., Sufian, S. M., Goh Boon, T., Richard, R., Saadah, A. R., Mohamed Razman, Y., & Abdul Fatah, A. M. (2006). Development of SiC/MgO distributed bragg reflector using RF magnetron sputtering technique. In ICSE 2006: 2006 IEEE International Conference on Semiconductor Electronics, Proceedings (pp. 378-381). Article 4266635 (IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE). https://doi.org/10.1109/SMELEC.2006.381085

@inproceedings{dcad6eff9d5f439baeddadd97da861ba,

title = "Development of SiC/MgO distributed bragg reflector using RF magnetron sputtering technique",

abstract = "A Bragg mirror structure is an essential part for vertical cavity surface emission laser (VCSEL) applications. High optical reflectance at required stopband width is one of major concern by means of application requirements. For this purpose, Bragg mirrors consisting of SiC/MgO multilayers have been developed using an RF magnetron sputtering technique at room temperature. These structures have been characterized using various measurement techniques like ellipsometry, reflectance spectroscopy, Fourier transform infrared (FTIR) spectroscopy, scanning electron microscopy (SEM) and X-ray diffraction (XRD) technique. From these measurements, it was confirmed that mirror materials were deposited on the substrates. For application requirement, the DBR mirror structure fabricated using only a seven period SiC/MgO multilayered structure produced the expected stop-band at 850 nm wavelength with high reflectivity of 95%.",

author = "{Khairul Anuar}, {M. S.} and Hariyadi Soetedjo and {Mohd Sharizal}, A. and Sufian, {S. M.} and {Goh Boon}, T. and R. Richard and Saadah, {A. R.} and {Mohamed Razman}, Y. and {Abdul Fatah}, {A. M.}",

year = "2006",

doi = "10.1109/SMELEC.2006.381085",

language = "English (US)",

isbn = "0780397312",

series = "IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE",

pages = "378--381",

booktitle = "ICSE 2006",

note = "2006 IEEE International Conference on Semiconductor Electronics, ICSE 2006 ; Conference date: 29-11-2006 Through 01-12-2006",

}

Khairul Anuar, MS, Soetedjo, H, Mohd Sharizal, A, Sufian, SM, Goh Boon, T, Richard, R, Saadah, AR, Mohamed Razman, Y & Abdul Fatah, AM 2006, Development of SiC/MgO distributed bragg reflector using RF magnetron sputtering technique. in ICSE 2006: 2006 IEEE International Conference on Semiconductor Electronics, Proceedings., 4266635, IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE, pp. 378-381, 2006 IEEE International Conference on Semiconductor Electronics, ICSE 2006, Kuala Lumpur, Malaysia, 11/29/06. https://doi.org/10.1109/SMELEC.2006.381085

Development of SiC/MgO distributed bragg reflector using RF magnetron sputtering technique. / Khairul Anuar, M. S.; Soetedjo, Hariyadi; Mohd Sharizal, A. et al.
ICSE 2006: 2006 IEEE International Conference on Semiconductor Electronics, Proceedings. 2006. p. 378-381 4266635 (IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - Development of SiC/MgO distributed bragg reflector using RF magnetron sputtering technique

AU - Khairul Anuar, M. S.

AU - Soetedjo, Hariyadi

AU - Mohd Sharizal, A.

AU - Sufian, S. M.

AU - Goh Boon, T.

AU - Richard, R.

AU - Saadah, A. R.

AU - Mohamed Razman, Y.

AU - Abdul Fatah, A. M.

PY - 2006

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N2 - A Bragg mirror structure is an essential part for vertical cavity surface emission laser (VCSEL) applications. High optical reflectance at required stopband width is one of major concern by means of application requirements. For this purpose, Bragg mirrors consisting of SiC/MgO multilayers have been developed using an RF magnetron sputtering technique at room temperature. These structures have been characterized using various measurement techniques like ellipsometry, reflectance spectroscopy, Fourier transform infrared (FTIR) spectroscopy, scanning electron microscopy (SEM) and X-ray diffraction (XRD) technique. From these measurements, it was confirmed that mirror materials were deposited on the substrates. For application requirement, the DBR mirror structure fabricated using only a seven period SiC/MgO multilayered structure produced the expected stop-band at 850 nm wavelength with high reflectivity of 95%.

AB - A Bragg mirror structure is an essential part for vertical cavity surface emission laser (VCSEL) applications. High optical reflectance at required stopband width is one of major concern by means of application requirements. For this purpose, Bragg mirrors consisting of SiC/MgO multilayers have been developed using an RF magnetron sputtering technique at room temperature. These structures have been characterized using various measurement techniques like ellipsometry, reflectance spectroscopy, Fourier transform infrared (FTIR) spectroscopy, scanning electron microscopy (SEM) and X-ray diffraction (XRD) technique. From these measurements, it was confirmed that mirror materials were deposited on the substrates. For application requirement, the DBR mirror structure fabricated using only a seven period SiC/MgO multilayered structure produced the expected stop-band at 850 nm wavelength with high reflectivity of 95%.

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Khairul Anuar MS, Soetedjo H, Mohd Sharizal A, Sufian SM, Goh Boon T, Richard R et al. Development of SiC/MgO distributed bragg reflector using RF magnetron sputtering technique. In ICSE 2006: 2006 IEEE International Conference on Semiconductor Electronics, Proceedings. 2006. p. 378-381. 4266635. (IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE). doi: 10.1109/SMELEC.2006.381085

Development of SiC/MgO distributed bragg reflector using RF magnetron sputtering technique

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