Development of barrier slurry for improved electrical performance

Engineering

• Synergy 100%
• Performance 100%
• Development 100%
• Chemical Mechanical Polishing 50%
• Electrical Performance 50%
• Defect Density 50%
• Polishing Slurry 50%
• Polishing Process 50%
• Testing 50%
• Defects 50%
• Characteristics 50%
• Requirements 50%
• Windows 50%
• Nodes 50%

Material Science

• Slurry 100%
• Defect Density 50%
• Defect 50%
• Devices 50%
• Topography 50%