This paper presents the development of a wireless magnetic field sensor consisting of a three-layer thin-film giant magnetoimpedance sensor and a surface acoustic wave device on one substrate. The goal of this integration is a passive and remotely interrogated sensor that can be easily mass fabricated using standard microfabrication tools. The design parameters, fabrication process, and a model of the integrated sensor are presented together with experimental results of the sensor. © 2011 American Institute of Physics.
|Original language||English (US)|
|Journal||Journal of Applied Physics|
|State||Published - Apr 6 2011|
Bibliographical noteKAUST Repository Item: Exported on 2020-10-01
Acknowledgements: This work was performed in part at the Lurie Nanofabrication Facility at the University of Michigan, a member of the National Nanotechnology Infrastructure Network, which is supported in part by the National Science Foundation.
ASJC Scopus subject areas
- Physics and Astronomy(all)