Abstract
This paper presents the development of a wireless magnetic field sensor consisting of a three-layer thin-film giant magnetoimpedance sensor and a surface acoustic wave device on one substrate. The goal of this integration is a passive and remotely interrogated sensor that can be easily mass fabricated using standard microfabrication tools. The design parameters, fabrication process, and a model of the integrated sensor are presented together with experimental results of the sensor. © 2011 American Institute of Physics.
Original language | English (US) |
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Pages (from-to) | 07E524 |
Journal | Journal of Applied Physics |
Volume | 109 |
Issue number | 7 |
DOIs | |
State | Published - Apr 6 2011 |
Bibliographical note
KAUST Repository Item: Exported on 2020-10-01Acknowledgements: This work was performed in part at the Lurie Nanofabrication Facility at the University of Michigan, a member of the National Nanotechnology Infrastructure Network, which is supported in part by the National Science Foundation.
ASJC Scopus subject areas
- General Physics and Astronomy