Development of a passive and remote magnetic microsensor with thin-film giant magnetoimpedance element and surface acoustic wave transponder

Hommood Al Rowais; Bodong Li; Cai Liang; Scott Ryan Green; Yogesh B. Gianchandani; Jürgen Kosel

doi:10.1063/1.3562041

Development of a passive and remote magnetic microsensor with thin-film giant magnetoimpedance element and surface acoustic wave transponder

Hommood Al Rowais, Bodong Li, Cai Liang, Scott Ryan Green, Yogesh B. Gianchandani, Jürgen Kosel

Research output: Contribution to journal › Article › peer-review

10 Scopus citations

Abstract

This paper presents the development of a wireless magnetic field sensor consisting of a three-layer thin-film giant magnetoimpedance sensor and a surface acoustic wave device on one substrate. The goal of this integration is a passive and remotely interrogated sensor that can be easily mass fabricated using standard microfabrication tools. The design parameters, fabrication process, and a model of the integrated sensor are presented together with experimental results of the sensor. © 2011 American Institute of Physics.

Original language	English (US)
Pages (from-to)	07E524
Journal	Journal of Applied Physics
Volume	109
Issue number	7
DOIs	https://doi.org/10.1063/1.3562041
State	Published - Apr 6 2011

Bibliographical note

KAUST Repository Item: Exported on 2020-10-01
Acknowledgements: This work was performed in part at the Lurie Nanofabrication Facility at the University of Michigan, a member of the National Nanotechnology Infrastructure Network, which is supported in part by the National Science Foundation.

ASJC Scopus subject areas

General Physics and Astronomy

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10.1063/1.3562041

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abstract = "This paper presents the development of a wireless magnetic field sensor consisting of a three-layer thin-film giant magnetoimpedance sensor and a surface acoustic wave device on one substrate. The goal of this integration is a passive and remotely interrogated sensor that can be easily mass fabricated using standard microfabrication tools. The design parameters, fabrication process, and a model of the integrated sensor are presented together with experimental results of the sensor. {\textcopyright} 2011 American Institute of Physics.",

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AU - Gianchandani, Yogesh B.

AU - Kosel, Jürgen

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Development of a passive and remote magnetic microsensor with thin-film giant magnetoimpedance element and surface acoustic wave transponder

Abstract

Bibliographical note

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