Abstract
We report on the design of highly reflecting two-dimensional photonic crystal (2D-PC) mirrors, which can be integrated in a short InGaAs QWs laser source, operating around 970 nm. These mirrors consist of a triangular lattice of air holes into the GaAs slab, whose geometrical parameters have been calculated by the effective index method and 2D plane wave expansion method. A 2D finite-difference time-domain (2D-FDTD) model has also been used in order to evaluate the transmission and reflection characteristics of 2D-PC front and back mirrors of the in-plane laser. Finally, a detailed description of the nanotechnology processes necessary for the fabrication of ultra-compact in-plane laser is shown.
Original language | English (US) |
---|---|
Pages (from-to) | 377-382 |
Number of pages | 6 |
Journal | Microelectronic Engineering |
Volume | 73-74 |
DOIs | |
State | Published - Jun 1 2004 |
Externally published | Yes |
Event | Micro and Nano Engineering 2003 - Cambridge, United Kingdom Duration: Sep 22 2003 → Sep 25 2003 |
Keywords
- Dry etching
- Electron beam lithography
- Finite difference time domain
- Laser cavity
- Photonic crystal
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering