Design, fabrication, and evaluation of on-chip micro-supercapacitors

Majid Beidaghi; Wei Chen; Chunlei Wang

doi:10.1117/12.884350

Design, fabrication, and evaluation of on-chip micro-supercapacitors

Majid Beidaghi^*, Wei Chen, Chunlei Wang

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

7 Scopus citations

Abstract

Development of miniaturized electronic systems has stimulated the demand for miniaturized power sources that can be integrated into such systems. Among the different micro power sources micro electrochemical energy storage and conversion devices are particularly attractive because of their high efficiency and relatively high energy density. Electrochemical micro-capacitors or micro-supercapacitors offer higher power density compared to micro-batteries and micro-fuel cells. In this paper, development of on-chip micro-supercapacitors based on interdigitated C-MEMS electrode microarrays is introduced. C-MEMS electrodes are employed both as electrode material for electric double layer capacitor (EDLC) or as three dimensional (3D) current collectors of EDLC or pseudo-capacitive materials. Recent advancements in fabrication methods of C-MEMS based micro-supercapacitors are discussed and electrochemical properties of C-MEMS electrodes and it composites are reviewed.

Original language	English (US)
Title of host publication	Energy Harvesting and Storage
Subtitle of host publication	Materials, Devices, and Applications II
DOIs	https://doi.org/10.1117/12.884350
State	Published - 2011
Event	Energy Harvesting and Storage: Materials, Devices, and Applications II - Orlando, FL, United States Duration: Apr 25 2011 → Apr 28 2011

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	8035
ISSN (Print)	0277-786X

Other

Other	Energy Harvesting and Storage: Materials, Devices, and Applications II
Country/Territory	United States
City	Orlando, FL
Period	04/25/11 → 04/28/11

Keywords

Carbon-microelectomechanical systems (C-MEMS)
Micro-supercapacitor
On-chip micro-power

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.884350

Cite this

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title = "Design, fabrication, and evaluation of on-chip micro-supercapacitors",

abstract = "Development of miniaturized electronic systems has stimulated the demand for miniaturized power sources that can be integrated into such systems. Among the different micro power sources micro electrochemical energy storage and conversion devices are particularly attractive because of their high efficiency and relatively high energy density. Electrochemical micro-capacitors or micro-supercapacitors offer higher power density compared to micro-batteries and micro-fuel cells. In this paper, development of on-chip micro-supercapacitors based on interdigitated C-MEMS electrode microarrays is introduced. C-MEMS electrodes are employed both as electrode material for electric double layer capacitor (EDLC) or as three dimensional (3D) current collectors of EDLC or pseudo-capacitive materials. Recent advancements in fabrication methods of C-MEMS based micro-supercapacitors are discussed and electrochemical properties of C-MEMS electrodes and it composites are reviewed.",

keywords = "Carbon-microelectomechanical systems (C-MEMS), Micro-supercapacitor, On-chip micro-power",

author = "Majid Beidaghi and Wei Chen and Chunlei Wang",

year = "2011",

doi = "10.1117/12.884350",

language = "English (US)",

isbn = "9780819486097",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

booktitle = "Energy Harvesting and Storage",

note = "Energy Harvesting and Storage: Materials, Devices, and Applications II ; Conference date: 25-04-2011 Through 28-04-2011",

}

Beidaghi, M, Chen, W & Wang, C 2011, Design, fabrication, and evaluation of on-chip micro-supercapacitors. in Energy Harvesting and Storage: Materials, Devices, and Applications II., 80350J, Proceedings of SPIE - The International Society for Optical Engineering, vol. 8035, Energy Harvesting and Storage: Materials, Devices, and Applications II, Orlando, FL, United States, 04/25/11. https://doi.org/10.1117/12.884350

Design, fabrication, and evaluation of on-chip micro-supercapacitors. / Beidaghi, Majid; Chen, Wei; Wang, Chunlei.
Energy Harvesting and Storage: Materials, Devices, and Applications II. 2011. 80350J (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8035).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Beidaghi, Majid

AU - Chen, Wei

AU - Wang, Chunlei

PY - 2011

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N2 - Development of miniaturized electronic systems has stimulated the demand for miniaturized power sources that can be integrated into such systems. Among the different micro power sources micro electrochemical energy storage and conversion devices are particularly attractive because of their high efficiency and relatively high energy density. Electrochemical micro-capacitors or micro-supercapacitors offer higher power density compared to micro-batteries and micro-fuel cells. In this paper, development of on-chip micro-supercapacitors based on interdigitated C-MEMS electrode microarrays is introduced. C-MEMS electrodes are employed both as electrode material for electric double layer capacitor (EDLC) or as three dimensional (3D) current collectors of EDLC or pseudo-capacitive materials. Recent advancements in fabrication methods of C-MEMS based micro-supercapacitors are discussed and electrochemical properties of C-MEMS electrodes and it composites are reviewed.

AB - Development of miniaturized electronic systems has stimulated the demand for miniaturized power sources that can be integrated into such systems. Among the different micro power sources micro electrochemical energy storage and conversion devices are particularly attractive because of their high efficiency and relatively high energy density. Electrochemical micro-capacitors or micro-supercapacitors offer higher power density compared to micro-batteries and micro-fuel cells. In this paper, development of on-chip micro-supercapacitors based on interdigitated C-MEMS electrode microarrays is introduced. C-MEMS electrodes are employed both as electrode material for electric double layer capacitor (EDLC) or as three dimensional (3D) current collectors of EDLC or pseudo-capacitive materials. Recent advancements in fabrication methods of C-MEMS based micro-supercapacitors are discussed and electrochemical properties of C-MEMS electrodes and it composites are reviewed.

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Design, fabrication, and evaluation of on-chip micro-supercapacitors

Abstract

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Keywords

ASJC Scopus subject areas

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