Design and finite element method analysis of laterally actuated multi-value nano electromechanical switches

Hussam Kloub, Casey Smith, Muhammad Mustafa Hussain

Research output: Contribution to journalArticlepeer-review

2 Scopus citations


We report on the design and modeling of novel nano electromechanical switches suitable for implementing reset/set flip-flops, AND, NOR, and XNOR Boolean functions. Multiple logic operations can be implemented using only one switching action enabling parallel data processing; a feature that renders this design competitive with complementary metal oxide semiconductor and superior to conventional nano-electromechanical switches in terms of functionality per device footprint. The structural architecture of the newly designed switch consists of a pinned flexural beam structure which allows low strain lateral actuation for enhanced mechanical integrity. Reliable control of on-state electrical current density is achieved through the use of metal-metal contacts, true parallel beam deflection, and lithographically defined contact area to prevent possible device welding. Dynamic response as a function of device dimensions numerically investigated using ANSYS and MatLab Simulink. © 2011 The Japan Society of Applied Physics.
Original languageEnglish (US)
Pages (from-to)094301
JournalJapanese Journal of Applied Physics
Issue number9
StatePublished - Sep 20 2011

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this