Design and fabrication of on-fiber diffractive elements for fiber-waveguide coupling by means of e-beam lithography

M. Prasciolu; D. Cojoc; S. Cabrini; L. Businaro; P. Candeloro; M. Tormen; R. Kumar; C. Liberale; V. Degiorgio; A. Gerardino; G. Gigli; D. Pisignano; E. Di Fabrizio; R. Cingolani

doi:10.1016/S0167-9317(03)00068-6

Design and fabrication of on-fiber diffractive elements for fiber-waveguide coupling by means of e-beam lithography

M. Prasciolu^*, D. Cojoc, S. Cabrini, L. Businaro, P. Candeloro, M. Tormen, R. Kumar, C. Liberale, V. Degiorgio, A. Gerardino, G. Gigli, D. Pisignano, E. Di Fabrizio, R. Cingolani

^*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

37 Scopus citations

Abstract

The aim of this paper is to demonstrate that efficient fiber-waveguide optical coupling can be achieved using a multilevel phase diffractive element (PDE) fabricated directly on the top of the fiber by means of e-beam lithography. The diffractive phase element is calculated to focus and reshape the gaussian symmetric beam exiting a single-mode fiber into a desired asymmetric intensity distribution at the waveguide input plane. Phase modulation is obtained by multilevel profiling a polymeric material coated on the top of the fiber by means of a specific fabrication process including e-beam lithography and chemical etching. Experimental results obtained for fiber-waveguide coupling with a 20-μm diameter diffractive element are also presented.

Original language	English (US)
Pages (from-to)	169-174
Number of pages	6
Journal	Microelectronic Engineering
Volume	67-68
DOIs	https://doi.org/10.1016/S0167-9317(03)00068-6
State	Published - Jun 2003
Externally published	Yes
Event	Proceedings of the 28th International Conference on MNE - Lugano, Switzerland Duration: Sep 16 2002 → Sep 19 2002

Keywords

Fiber-waveguide coupling
Phase diffractive elements
e-Beam lithography

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

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10.1016/S0167-9317(03)00068-6

Cite this

Prasciolu, M., Cojoc, D., Cabrini, S., Businaro, L., Candeloro, P., Tormen, M., Kumar, R., Liberale, C., Degiorgio, V., Gerardino, A., Gigli, G., Pisignano, D., Di Fabrizio, E., & Cingolani, R. (2003). Design and fabrication of on-fiber diffractive elements for fiber-waveguide coupling by means of e-beam lithography. Microelectronic Engineering, 67-68, 169-174. https://doi.org/10.1016/S0167-9317(03)00068-6

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title = "Design and fabrication of on-fiber diffractive elements for fiber-waveguide coupling by means of e-beam lithography",

abstract = "The aim of this paper is to demonstrate that efficient fiber-waveguide optical coupling can be achieved using a multilevel phase diffractive element (PDE) fabricated directly on the top of the fiber by means of e-beam lithography. The diffractive phase element is calculated to focus and reshape the gaussian symmetric beam exiting a single-mode fiber into a desired asymmetric intensity distribution at the waveguide input plane. Phase modulation is obtained by multilevel profiling a polymeric material coated on the top of the fiber by means of a specific fabrication process including e-beam lithography and chemical etching. Experimental results obtained for fiber-waveguide coupling with a 20-μm diameter diffractive element are also presented.",

keywords = "Fiber-waveguide coupling, Phase diffractive elements, e-Beam lithography",

author = "M. Prasciolu and D. Cojoc and S. Cabrini and L. Businaro and P. Candeloro and M. Tormen and R. Kumar and C. Liberale and V. Degiorgio and A. Gerardino and G. Gigli and D. Pisignano and {Di Fabrizio}, E. and R. Cingolani",

year = "2003",

month = jun,

doi = "10.1016/S0167-9317(03)00068-6",

language = "English (US)",

volume = "67-68",

pages = "169--174",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "ELSEVIER SCIENCE BV",

note = "Proceedings of the 28th International Conference on MNE ; Conference date: 16-09-2002 Through 19-09-2002",

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Prasciolu, M, Cojoc, D, Cabrini, S, Businaro, L, Candeloro, P, Tormen, M, Kumar, R, Liberale, C, Degiorgio, V, Gerardino, A, Gigli, G, Pisignano, D, Di Fabrizio, E & Cingolani, R 2003, 'Design and fabrication of on-fiber diffractive elements for fiber-waveguide coupling by means of e-beam lithography', Microelectronic Engineering, vol. 67-68, pp. 169-174. https://doi.org/10.1016/S0167-9317(03)00068-6

TY - JOUR

T1 - Design and fabrication of on-fiber diffractive elements for fiber-waveguide coupling by means of e-beam lithography

AU - Prasciolu, M.

AU - Cojoc, D.

AU - Cabrini, S.

AU - Businaro, L.

AU - Candeloro, P.

AU - Tormen, M.

AU - Kumar, R.

AU - Liberale, C.

AU - Degiorgio, V.

AU - Gerardino, A.

AU - Gigli, G.

AU - Pisignano, D.

AU - Di Fabrizio, E.

AU - Cingolani, R.

PY - 2003/6

Y1 - 2003/6

N2 - The aim of this paper is to demonstrate that efficient fiber-waveguide optical coupling can be achieved using a multilevel phase diffractive element (PDE) fabricated directly on the top of the fiber by means of e-beam lithography. The diffractive phase element is calculated to focus and reshape the gaussian symmetric beam exiting a single-mode fiber into a desired asymmetric intensity distribution at the waveguide input plane. Phase modulation is obtained by multilevel profiling a polymeric material coated on the top of the fiber by means of a specific fabrication process including e-beam lithography and chemical etching. Experimental results obtained for fiber-waveguide coupling with a 20-μm diameter diffractive element are also presented.

AB - The aim of this paper is to demonstrate that efficient fiber-waveguide optical coupling can be achieved using a multilevel phase diffractive element (PDE) fabricated directly on the top of the fiber by means of e-beam lithography. The diffractive phase element is calculated to focus and reshape the gaussian symmetric beam exiting a single-mode fiber into a desired asymmetric intensity distribution at the waveguide input plane. Phase modulation is obtained by multilevel profiling a polymeric material coated on the top of the fiber by means of a specific fabrication process including e-beam lithography and chemical etching. Experimental results obtained for fiber-waveguide coupling with a 20-μm diameter diffractive element are also presented.

KW - Fiber-waveguide coupling

KW - Phase diffractive elements

KW - e-Beam lithography

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U2 - 10.1016/S0167-9317(03)00068-6

DO - 10.1016/S0167-9317(03)00068-6

M3 - Conference article

AN - SCOPUS:0038697370

SN - 0167-9317

VL - 67-68

SP - 169

EP - 174

JO - Microelectronic Engineering

JF - Microelectronic Engineering

T2 - Proceedings of the 28th International Conference on MNE

Y2 - 16 September 2002 through 19 September 2002

ER -

Design and fabrication of on-fiber diffractive elements for fiber-waveguide coupling by means of e-beam lithography

Abstract

Keywords

ASJC Scopus subject areas

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