Engineering
Capacitive
100%
Gas Sensor
100%
Sensing Film
75%
Electrode Structure
50%
Fine Resolution
25%
Design Parameter
25%
Electric Field
25%
Side Wall
25%
Finite Element Simulation
25%
Sensing Mechanisms
25%
Prototype Sensor
25%
Half Wavelength
25%
Dry Etching
25%
Keyphrases
Smart Gas Meter
100%
Sensing Film
50%
Capacitive Gas Sensor
16%
Prototype Sensor
16%
Electrode Fabrication
16%
Half-wavelength
16%
Sensing Mechanism
16%
Good Yield
16%
Metal Thickness
16%
Hand Sensing
16%
Dry Etching
16%
Electrode Metal
16%
Lift-off
16%
Optimum Thickness
16%
Material Science
Gas Sensor
100%
Film
100%
Permittivity
50%
Dry Etching
50%
Sensing Mechanisms
50%