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Deposition method-induced stress effect on ultrathin titanium nitride etch characteristics
M. M. Hussain*, M. A. Quevedo-Lopez, H. N. Alshareef, D. Larison, K. Mathur, B. E. Gnade
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
7
Scopus
citations