Demonstration of integrated micro-electro-mechanical relay circuits for VLSI applications

Matthew Spencer*, Fred Chen, Cheng C. Wang, Rhesa Nathanael, Hossein Fariborzi, Abhinav Gupta, Hei Kam, Vincent Pott, Jaeseok Jeon, Tsu Jae King Liu, Dejan Marković, Elad Alon, Vladimir Stojanović

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

159 Scopus citations

Fingerprint

Dive into the research topics of 'Demonstration of integrated micro-electro-mechanical relay circuits for VLSI applications'. Together they form a unique fingerprint.

Engineering

Keyphrases