D33 mode piezoelectric diaphragm based acoustic transducer with high sensitivity

Zhiyuan Shen; Jingyu Lu; Cheewee Tan; Jianmin Miao; Zhihong Wang

doi:10.1016/j.sna.2012.09.028

D33 mode piezoelectric diaphragm based acoustic transducer with high sensitivity

Zhiyuan Shen, Jingyu Lu, Cheewee Tan, Jianmin Miao, Zhihong Wang

Imaging & Characterization Core Lab

Research output: Contribution to journal › Article › peer-review

26 Scopus citations

Abstract

This paper presents the design, fabrication, and characterization of an acoustic transducer using a piezoelectric freestanding bulk diaphragm as the sensing element. The diaphragm bearing the spiral electrode operates in d 33 mode, which allows the in-plane deformation of the diaphragm to be converted to the out-of-plane deformation and generates an acoustic wave in the same direction. A finite element code is developed to reorient the material polarization distribution according to the poling field calculated. The first four resonance modes have been simulated and verified by impedance and velocity spectra. The sensitivity and the sound pressure level of the transducer were characterized. The realized sensitivity of 126.21 μV/Pa at 1 kHz is nearly twenty times of the sensitivity of a sandwich d31 mode transducer. © 2012 Elsevier B.V.

Original language	English (US)
Pages (from-to)	93-99
Number of pages	7
Journal	Sensors and Actuators, A: Physical
Volume	189
DOIs	https://doi.org/10.1016/j.sna.2012.09.028
State	Published - Jan 2013

Bibliographical note

KAUST Repository Item: Exported on 2020-10-01

ASJC Scopus subject areas

Instrumentation
Surfaces, Coatings and Films
Metals and Alloys
Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering
Condensed Matter Physics

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10.1016/j.sna.2012.09.028

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title = "D33 mode piezoelectric diaphragm based acoustic transducer with high sensitivity",

abstract = "This paper presents the design, fabrication, and characterization of an acoustic transducer using a piezoelectric freestanding bulk diaphragm as the sensing element. The diaphragm bearing the spiral electrode operates in d 33 mode, which allows the in-plane deformation of the diaphragm to be converted to the out-of-plane deformation and generates an acoustic wave in the same direction. A finite element code is developed to reorient the material polarization distribution according to the poling field calculated. The first four resonance modes have been simulated and verified by impedance and velocity spectra. The sensitivity and the sound pressure level of the transducer were characterized. The realized sensitivity of 126.21 μV/Pa at 1 kHz is nearly twenty times of the sensitivity of a sandwich d31 mode transducer. {\textcopyright} 2012 Elsevier B.V.",

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T1 - D33 mode piezoelectric diaphragm based acoustic transducer with high sensitivity

AU - Shen, Zhiyuan

AU - Lu, Jingyu

AU - Tan, Cheewee

AU - Miao, Jianmin

AU - Wang, Zhihong

N1 - KAUST Repository Item: Exported on 2020-10-01

PY - 2013/1

Y1 - 2013/1

N2 - This paper presents the design, fabrication, and characterization of an acoustic transducer using a piezoelectric freestanding bulk diaphragm as the sensing element. The diaphragm bearing the spiral electrode operates in d 33 mode, which allows the in-plane deformation of the diaphragm to be converted to the out-of-plane deformation and generates an acoustic wave in the same direction. A finite element code is developed to reorient the material polarization distribution according to the poling field calculated. The first four resonance modes have been simulated and verified by impedance and velocity spectra. The sensitivity and the sound pressure level of the transducer were characterized. The realized sensitivity of 126.21 μV/Pa at 1 kHz is nearly twenty times of the sensitivity of a sandwich d31 mode transducer. © 2012 Elsevier B.V.

AB - This paper presents the design, fabrication, and characterization of an acoustic transducer using a piezoelectric freestanding bulk diaphragm as the sensing element. The diaphragm bearing the spiral electrode operates in d 33 mode, which allows the in-plane deformation of the diaphragm to be converted to the out-of-plane deformation and generates an acoustic wave in the same direction. A finite element code is developed to reorient the material polarization distribution according to the poling field calculated. The first four resonance modes have been simulated and verified by impedance and velocity spectra. The sensitivity and the sound pressure level of the transducer were characterized. The realized sensitivity of 126.21 μV/Pa at 1 kHz is nearly twenty times of the sensitivity of a sandwich d31 mode transducer. © 2012 Elsevier B.V.

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JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

ER -

D33 mode piezoelectric diaphragm based acoustic transducer with high sensitivity

Abstract

Bibliographical note

ASJC Scopus subject areas

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