TY - PAT
T1 - Cylindrical-shaped nanotube field effect transistor
AU - Hussain, Muhammad Mustafa
AU - Fahad, Hossain M.
AU - Smith, Casey
AU - Rojas, Jhonathan Prieto
N1 - KAUST Repository Item: Exported on 2019-02-13
PY - 2015/12/29
Y1 - 2015/12/29
N2 - A cylindrical-shaped nanotube FET may be manufactured on silicon (Si) substrates as a ring etched into a gate stack and filled with semiconductor material. An inner gate electrode couples to a region of the gate stack inside the inner circumference of the ring. An outer gate electrode couples to a region of the gate stack outside the outer circumference of the ring. The multi-gate cylindrical-shaped nanotube FET operates in volume inversion for ring widths below 15 nanometers. The cylindrical-shaped nanotube FET demonstrates better short channel effect (SCE) mitigation and higher performance (I.sub.on/I.sub.off) than conventional transistor devices. The cylindrical-shaped nanotube FET may also be manufactured with higher yields and cheaper costs than conventional transistors.
AB - A cylindrical-shaped nanotube FET may be manufactured on silicon (Si) substrates as a ring etched into a gate stack and filled with semiconductor material. An inner gate electrode couples to a region of the gate stack inside the inner circumference of the ring. An outer gate electrode couples to a region of the gate stack outside the outer circumference of the ring. The multi-gate cylindrical-shaped nanotube FET operates in volume inversion for ring widths below 15 nanometers. The cylindrical-shaped nanotube FET demonstrates better short channel effect (SCE) mitigation and higher performance (I.sub.on/I.sub.off) than conventional transistor devices. The cylindrical-shaped nanotube FET may also be manufactured with higher yields and cheaper costs than conventional transistors.
UR - http://hdl.handle.net/10754/595856
UR - http://patft.uspto.gov/netacgi/nph-Parser?Sect1=PTO1&Sect2=HITOFF&d=PALL&p=1&u=%2Fnetahtml%2FPTO%2Fsrchnum.htm&r=1&f=G&l=50&s1=9224813.PN.&OS=PN/9224813&RS=PN/9224813
UR - http://assignment.uspto.gov/#/search?q=20140008606&sort=patAssignorEarliestExDate%20desc&synonyms=false
UR - http://www.google.com/patents/US9224813
UR - http://worldwide.espacenet.com/publicationDetails/biblio?CC=US&NR=2014008606A1&KC=A1&FT=D
M3 - Patent
M1 - US 9224813 B2
ER -