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Crystallization and silicon diffusion nanoscale effects on the electrical properties of Al2O3 based devices
M. Lanza, M. Porti, M. Nafria, X. Aymerich, G. Benstetter, E. Lodermeier, H. Ranzinger, G. Jaschke, S. Teichert, L. Wilde, P. Michalowski
Research output: Contribution to journal › Article › peer-review
27
Scopus
citations