Abstract
In this work, Atomic Force Microscopy (AFM) based techniques are used to study, at the nanoscale, the dependence of the electrical properties of Al2O3 stacks for Flash memories on the percent of diffused Silicon and material crystallization after being annealed at different temperatures. © 2009 Elsevier B.V. All rights reserved.
Original language | English (US) |
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Pages (from-to) | 1921-1924 |
Number of pages | 4 |
Journal | Microelectronic Engineering |
Volume | 86 |
Issue number | 7-9 |
DOIs | |
State | Published - Jul 1 2009 |
Externally published | Yes |
Bibliographical note
Generated from Scopus record by KAUST IRTS on 2021-03-16ASJC Scopus subject areas
- Surfaces, Coatings and Films
- Atomic and Molecular Physics, and Optics
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering
- Condensed Matter Physics