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Critical components of FinFET integration: Examining the density trade-off and process integration for FinFIT implementation
H. Rusty Harris, Muhammad Mustafa Hussain, Ji Woon Yang, Casey Smith, Joel Barnett, Barry Sassman, S. C. Song, B. H. Lee, H. F. Tseng, Raj Jammy
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
3
Scopus
citations