Core-shell magnetic nanoparticles for on-chip RF inductors

Kisik Koh, Jeaneun Park, Jungwon Park, Xu Zhu, Liwei Lin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

11 Scopus citations


FeNi3 based core-shell magnetic nanoparticles are demonstrated as the magnetic core material for on-chip, radio frequency (RF) inductors. FeNi3 nanoparticles with 50-150 nm in diameter with 15-20 nm-thick SiO2 coating are chemically synthesized and deposited on a planar inductor as the magnetic core to enhance both inductance (L) and quality factor (Q) of the inductor. Experimentally, the ferromagnetic resonant frequency of the on-chip inductors based on FeNi3 core-shell nanoparticles has been shown to be over several GHz. A post-CMOS process has been developed to integrate the magnetic nanoparticles to a planar inductor and inductance enhancements up to 50% of the original magnitude with slightly enhanced Q-factor up to 1 GHz have been achieved. © 2013 IEEE.
Original languageEnglish (US)
Title of host publication2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Number of pages4
ISBN (Print)9781467356558
StatePublished - Jan 2013
Externally publishedYes

Bibliographical note

KAUST Repository Item: Exported on 2020-10-01
Acknowledgements: This work was supported in part by an Academic Excellence Alliance grant awarded by the KAUST (King Abdullah University of Science and Technology) Office of Competitive Research Fund, the DARPA N/MEMS program and a SRC (Semiconductor Research Corporation) grant. The authors would like to thank Dr. Kevin O'Brien, Jun-Chau Chien and Chia Meng Chen for valuable discussions.
This publication acknowledges KAUST support, but has no KAUST affiliated authors.


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