Pb(Zr0.53Tio.47)C>3 (PZT) thin film capacitors have been fabricated with four electrode combinations: Pt/PZT/Pt/Si02/Si, RuO2/PZT/Pt/Si02/Si, Ru02/PZT/Ru02/Si02/Si, and Pt/PZT/Ru02/Si02/Si. It is shown that polarization fatigue is determined largely by the electrode type (Pt vs Ru02), and microstructure has only a second-order effect on fatigue. If either the top or bottom electrode is platinum, significant polarization fatigue occurs. Fatigue-free capacitors are obtained only when both electrodes are Ru02. In contrast, the bottom electrode is found to have a major effect on the leakage characteristics of the PZT capacitors, presumably via microstructural modifications. Capacitors with bottom Ru02 electrodes show high leakage currents (J = 10”3“1CT5 A/cm2 at 1 V) irrespective of the top electrode material. Capacitors with Pt bottom electrodes have much lower leakage currents (J = 10–8A/cm2 at 1 V) irrespective of the top electrode material. At low voltage, the I-V curves show ohmic behavior and negligible polarity dependence for all capacitor types. At higher voltages, the leakage current is probably Schottky emission controlled for the capacitors with Pt bottom electrodes.
Bibliographical noteFunding Information:
The authors would like to thank Dr. D. J. Licht-enwalner for many useful discussions and Mrs. Bojun Zhang for the TEM work. Support for this work was provided by ARPA (Advanced Research Projects Agency) under Contract No. N00014-93-1-0591.
ASJC Scopus subject areas
- Materials Science(all)
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering