Comparison of uniaxial wafer bending and contact-etch-stop-liner stress induced performance enhancement on double-gate FinFETs

Sagar Suthram*, M. M. Hussain, H. R. Harris, Casey Smith, H. H. Tseng, R. Jammy, S. E. Thompson

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

19 Scopus citations

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