Compact micropumping system based on LIGA fabricated microparts

M. Matteucci, F. Pérennès*, B. Marmiroli, P. Miotti, L. Vaccari, A. Gosparini, A. Turchet, E. Di Fabrizio

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

19 Scopus citations


This report presents design, fabrication and testing of a magnetically actuated microgear pumps based on the LIGA technology. These micropumps exhibit flow rates between 0.5 and 8.5 ml/min and head pressures up to 100 cm-H2O. Geometries are determined for an optimal magnetic coupling, resulting in a linear behavior of the flow rate versus rotation speed.

Original languageEnglish (US)
Pages (from-to)1288-1290
Number of pages3
JournalMicroelectronic Engineering
Issue number4-9 SPEC. ISS.
StatePublished - Apr 2006
Externally publishedYes


  • DXRL
  • LIGA
  • Microfluidic components
  • Microgear pump

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering


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