Compact micropumping system based on LIGA fabricated microparts

M. Matteucci; F. Pérennès; B. Marmiroli; P. Miotti; L. Vaccari; A. Gosparini; A. Turchet; E. Di Fabrizio

doi:10.1016/j.mee.2006.01.259

Compact micropumping system based on LIGA fabricated microparts

M. Matteucci, F. Pérennès^*, B. Marmiroli, P. Miotti, L. Vaccari, A. Gosparini, A. Turchet, E. Di Fabrizio

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

19 Scopus citations

Abstract

This report presents design, fabrication and testing of a magnetically actuated microgear pumps based on the LIGA technology. These micropumps exhibit flow rates between 0.5 and 8.5 ml/min and head pressures up to 100 cm-H₂O. Geometries are determined for an optimal magnetic coupling, resulting in a linear behavior of the flow rate versus rotation speed.

Original language	English (US)
Pages (from-to)	1288-1290
Number of pages	3
Journal	Microelectronic Engineering
Volume	83
Issue number	4-9 SPEC. ISS.
DOIs	https://doi.org/10.1016/j.mee.2006.01.259
State	Published - Apr 2006
Externally published	Yes

Keywords

DXRL
LIGA
Microfluidic components
Microgear pump

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Surfaces, Coatings and Films
Atomic and Molecular Physics, and Optics
Electrical and Electronic Engineering

Access to Document

10.1016/j.mee.2006.01.259

Cite this

@article{2f3d3f105529464db7e76c8f1860f9b2,

title = "Compact micropumping system based on LIGA fabricated microparts",

abstract = "This report presents design, fabrication and testing of a magnetically actuated microgear pumps based on the LIGA technology. These micropumps exhibit flow rates between 0.5 and 8.5 ml/min and head pressures up to 100 cm-H2O. Geometries are determined for an optimal magnetic coupling, resulting in a linear behavior of the flow rate versus rotation speed.",

keywords = "DXRL, LIGA, Microfluidic components, Microgear pump",

author = "M. Matteucci and F. P{\'e}renn{\`e}s and B. Marmiroli and P. Miotti and L. Vaccari and A. Gosparini and A. Turchet and {Di Fabrizio}, E.",

year = "2006",

month = apr,

doi = "10.1016/j.mee.2006.01.259",

language = "English (US)",

volume = "83",

pages = "1288--1290",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier B.V.",

number = "4-9 SPEC. ISS.",

}

TY - JOUR

T1 - Compact micropumping system based on LIGA fabricated microparts

AU - Matteucci, M.

AU - Pérennès, F.

AU - Marmiroli, B.

AU - Miotti, P.

AU - Vaccari, L.

AU - Gosparini, A.

AU - Turchet, A.

AU - Di Fabrizio, E.

PY - 2006/4

Y1 - 2006/4

N2 - This report presents design, fabrication and testing of a magnetically actuated microgear pumps based on the LIGA technology. These micropumps exhibit flow rates between 0.5 and 8.5 ml/min and head pressures up to 100 cm-H2O. Geometries are determined for an optimal magnetic coupling, resulting in a linear behavior of the flow rate versus rotation speed.

AB - This report presents design, fabrication and testing of a magnetically actuated microgear pumps based on the LIGA technology. These micropumps exhibit flow rates between 0.5 and 8.5 ml/min and head pressures up to 100 cm-H2O. Geometries are determined for an optimal magnetic coupling, resulting in a linear behavior of the flow rate versus rotation speed.

KW - DXRL

KW - LIGA

KW - Microfluidic components

KW - Microgear pump

UR - http://www.scopus.com/inward/record.url?scp=33748270728&partnerID=8YFLogxK

U2 - 10.1016/j.mee.2006.01.259

DO - 10.1016/j.mee.2006.01.259

M3 - Article

AN - SCOPUS:33748270728

SN - 0167-9317

VL - 83

SP - 1288

EP - 1290

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 4-9 SPEC. ISS.

ER -

Compact micropumping system based on LIGA fabricated microparts

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this