CMOS compatible fabrication of flexible and semi-transparent FeRAM on ultra-thin bulk monocrystalline silicon (100) fabric

Engineering

• Monocrystalline Silicon 100%
• Random Access Memory 100%
• Device Performance 50%
• Power Device 50%
• Crystalline Silicon 50%
• ULSI Circuits 50%
• Demonstrates 50%
• Flexible Electronics 50%

Material Science

• Ferroelectric Material 100%
• Power Device 50%
• Crystalline Material 50%
• Density 50%

Keyphrases

• FeRAM 100%
• Practical Potential 50%
• Low-power Devices 50%