We report on chemical etching of ordered Au nanostructure arrays to continuously tune their localized surface plasmon resonances (LSPR). Real-time extinction spectra were recorded from both Au nanodisks and nanospheres immobilized on glass substrates when immersed in Au etchant. The time-dependent LSPR frequencies, intensities, and bandwidths were studied theoretically with discrete dipole approximations and the Mie solution, and they were correlated with the evolution of the etched Au nanostructures' morphology (as examined by atomic force microscopy). Since this chemical etching method can conveniently and accurately tune LSPR, it offers precise control of plasmonic properties and can be useful in applications such as surfaceenhanced Raman spectroscopy and molecular resonance spectroscopy. © 2009 American Chemical Society.