Chemically amplified resists based on polymer side‐chain rearrangement or electrophilic crosslinking

J. M.J. Fréchet*, S. Matuszczak, S. M. Lee, J. Fahey, C. G. Willson

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

11 Scopus citations

Fingerprint

Dive into the research topics of 'Chemically amplified resists based on polymer side‐chain rearrangement or electrophilic crosslinking'. Together they form a unique fingerprint.

Pharmacology, Toxicology and Pharmaceutical Science

Engineering

Chemistry

Keyphrases