Physics
Atomic Force Microscopy
100%
Dielectrics
100%
High Resolution
100%
Permittivity
100%
Secondary Ion Mass Spectrometry
100%
Transition Element
100%
Transition Metal
100%
Transmission Electron Microscopy
100%
Material Science
Atomic Force Microscopy
50%
Capacitance
50%
Density
50%
Dielectric Material
100%
High-Resolution Transmission Electron Microscopy
50%
Mass Spectrometry
50%
Nitriding
100%
Oxidation Reaction
50%
Oxide Compound
50%
Permittivity
50%
Secondary Ion Mass Spectrometry
50%
Transition Metal
50%
Ultrathin Films
50%
Engineering
Atomic Force Microscopy
16%
Dielectrics
16%
Gate Dielectric
100%
High Resolution
16%
Material Surface
16%
Oxide Thickness
16%
Performed Measurement
33%
Starting Material
16%
Steam Generation
100%
Thermal Oxidation
16%
Transmissions
16%
Chemical Engineering
Secondary Ion Mass Spectrometry
100%
Transition Metal
100%
Voltage Measurement
100%
Keyphrases
Effective Dielectric Constant
16%
In-situ Steam Generation
100%
Thin EOT
16%