INIS
shock waves
100%
sensors
100%
damping
100%
loading
100%
holes
70%
films
60%
substrates
50%
devices
40%
size
40%
width
30%
microstructure
30%
perforation
30%
finite element method
20%
air
20%
dynamics
10%
gases
10%
physics
10%
motion
10%
modeling
10%
reliability
10%
pressure drop
10%
accelerometers
10%
failures
10%
computer codes
10%
Physics
Squeeze Films
100%
Mechanical Shock
100%
Responses
100%
Substrates
83%
Stiction
50%
Width
50%
Gaps
50%
Transients
33%
Air
33%
Plane
33%
Coefficients
33%
Resonant Frequencies
16%
Dynamic Response
16%
Gaseous State
16%
Model
16%
Pressure
16%
Area
16%
Reliability
16%
Estimates
16%
Physics
16%
Failure
16%
Engineering
Mechanical Shock
100%
Substrates
100%
Microstructure
60%
Stiction
60%
Perforation
60%
Hole Size
40%
Damping Coefficient
40%
Transients
40%
Assuming
40%
Microelectromechanical System
40%
Finite Element Modeling
40%
Pressure Drop
20%
Reliability
20%
Natural Frequency
20%
Plane Motion
20%
Dynamic Response
20%
Models
20%
Determines
20%
Failure (Mechanical)
20%
Modal Analysis
20%
Damping Effect
20%
Material Science
Characterization
100%
Shock Loads
100%
Film
100%
Sensor
100%
Devices
66%
Microstructure
50%
Air
33%
Accelerometer
16%
Gas
16%