INIS
accelerometers
12%
air
25%
computer codes
12%
damping
100%
devices
50%
dynamics
12%
failures
12%
films
75%
finite element method
12%
gases
12%
holes
75%
loading
100%
microelectromechanical systems
25%
microstructure
37%
modeling
12%
motion
12%
perforation
37%
performance
12%
pressure drop
12%
reliability
12%
sensors
100%
shock waves
100%
size
37%
substrates
50%
width
37%
Engineering
Assuming
50%
Damping Effect
25%
Dynamic Response
25%
Failure (Mechanical)
25%
Finite Element Modeling
25%
Fluidics
25%
Hole Size
25%
Mechanical Shock
100%
Microelectromechanical System
50%
Microstructure
75%
Models
50%
Perforation
75%
Performance
25%
Pressure Drop
25%
Reliability
25%
Stiction
75%
Structural Analysis
25%
Substrates
100%
Transients
25%
Physics
Air
33%
Area
16%
Dynamic Response
16%
Failure
16%
Gaps
50%
Gaseous State
16%
Mechanical Shock
100%
Microelectromechanical System
33%
Model
33%
Performance
16%
Pressure
16%
Reliability
16%
Responses
100%
Squeeze Films
100%
Stiction
50%
Structural Analysis
16%
Substrates
66%
Transients
16%
Width
50%
Material Science
Accelerometer
16%
Air
33%
Characterization
100%
Devices
66%
Film
100%
Gas
16%
Microstructure
50%
Sensor
100%
Shock Loads
100%
Structural Analysis
16%