Electrolyte thin films of Ce0 8Gd0 2O 1 9-δ; (GDC20) were deposited by pulsed laser deposition (PLD) for the fabrication of micro solid oxide fuel cells (SOFCs). The crystal structure and morphology of the films deposited on different substrates were investigated as a function of the growth parameters, using X-ray diffraction (XRD) and field emission scanning electron microscopy (FE-SEM) analysis. The film conductivity was measured in parallel and perpendicular directions of the film substrate using electrochemical impedance spectroscopy (EIS). Pt or La 0 8Sr0 2Co0 8Fe0 2O 3-δ (LSCF) films were used as electrodes in symmetrical cells. For parallel conductivity measurements, two electrodes were deposited by PLD on the surface of the film, while for perpendicular conductivity, thin film hetero-structure were grown sandwiching the electrolyte film between the two electrodes.