Capacitively coupled radio-frequency discharges in nitrogen at low pressures

Luís Lemos Alves, Luís S A Marques, Carlos D. Pintassilgo, Gaëtan Wattieaux, Et-touhami Es-sebbar, Johannes Berndt, Eva Kovačević, Nathalie Carrasco, Laïfa Boufendi, Guy Cernogora

Research output: Contribution to journal › Article › peer-review

44 Scopus citations

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Earth and Planetary Sciences

Chemistry

Engineering

Physics