Dc substrate biasing Vb is an important parameter for modulating the structure and magnetic properties of Facing Targets Sputtered (FTS) films. The effect of Vb is to promote diffusion and cause the resputtering of adatoms, and it also affects the deposition rate R and substrate temperature Ts.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering