Axially modulated clamped-guided arch resonator for memory and logic applications

Md Abdullah Al Hafiz; Sherif Tella; Nouha Alcheikh; Hossein Fariborzi; Mohammad I. Younis

doi:10.1115/DETC2017-68284

Axially modulated clamped-guided arch resonator for memory and logic applications

Md Abdullah Al Hafiz, Sherif Tella, Nouha Alcheikh, Hossein Fariborzi, Mohammad I. Younis

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

7 Scopus citations

Abstract

We experimentally demonstrate memory and logic devices based on an axially modulated clamped-guided arch resonator. The device are electrostatically actuated and capacitively sensed, while the resonance frequency modulation is achieved through an axial electrostatic force from the guided side of the clamped-guided arch microbeam. We present two case studies: first, a dynamic memory based on the nonlinear frequency response of the resonator, and second, a reprogrammable two-input logic gate based on the linear frequency modulation of the resonator. These devices show energy cost per memory/logic operation in pJ, are fully compatible with CMOS fabrication processes, have the potential for on-chip system integration, and operate at room temperature.

Original language	English (US)
Title of host publication	22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems
Publisher	American Society of Mechanical Engineers (ASME)
ISBN (Electronic)	9780791858165
DOIs	https://doi.org/10.1115/DETC2017-68284
State	Published - 2017
Event	ASME 2017 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2017 - Cleveland, United States Duration: Aug 6 2017 → Aug 9 2017

Publication series

Name	Proceedings of the ASME Design Engineering Technical Conference
Volume	4

Conference

Conference	ASME 2017 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2017
Country/Territory	United States
City	Cleveland
Period	08/6/17 → 08/9/17

Bibliographical note

Publisher Copyright:
© Copyright 2017 ASME.

Keywords

Axial stress modulation
Clamped-guided arch resonator
Electromechanical computation
Mechanical memory

ASJC Scopus subject areas

Mechanical Engineering
Computer Science Applications
Computer Graphics and Computer-Aided Design
Modeling and Simulation

Access to Document

10.1115/DETC2017-68284

Cite this

Al Hafiz, M. A., Tella, S., Alcheikh, N., Fariborzi, H., & Younis, M. I. (2017). Axially modulated clamped-guided arch resonator for memory and logic applications. In 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems (Proceedings of the ASME Design Engineering Technical Conference; Vol. 4). American Society of Mechanical Engineers (ASME). https://doi.org/10.1115/DETC2017-68284

Al Hafiz, Md Abdullah ; Tella, Sherif ; Alcheikh, Nouha et al. / Axially modulated clamped-guided arch resonator for memory and logic applications. 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems. American Society of Mechanical Engineers (ASME), 2017. (Proceedings of the ASME Design Engineering Technical Conference).

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title = "Axially modulated clamped-guided arch resonator for memory and logic applications",

abstract = "We experimentally demonstrate memory and logic devices based on an axially modulated clamped-guided arch resonator. The device are electrostatically actuated and capacitively sensed, while the resonance frequency modulation is achieved through an axial electrostatic force from the guided side of the clamped-guided arch microbeam. We present two case studies: first, a dynamic memory based on the nonlinear frequency response of the resonator, and second, a reprogrammable two-input logic gate based on the linear frequency modulation of the resonator. These devices show energy cost per memory/logic operation in pJ, are fully compatible with CMOS fabrication processes, have the potential for on-chip system integration, and operate at room temperature.",

keywords = "Axial stress modulation, Clamped-guided arch resonator, Electromechanical computation, Mechanical memory",

author = "{Al Hafiz}, {Md Abdullah} and Sherif Tella and Nouha Alcheikh and Hossein Fariborzi and Younis, {Mohammad I.}",

note = "Publisher Copyright: {\textcopyright} Copyright 2017 ASME.; ASME 2017 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2017 ; Conference date: 06-08-2017 Through 09-08-2017",

year = "2017",

doi = "10.1115/DETC2017-68284",

language = "English (US)",

series = "Proceedings of the ASME Design Engineering Technical Conference",

publisher = "American Society of Mechanical Engineers (ASME)",

booktitle = "22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems",

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Al Hafiz, MA, Tella, S, Alcheikh, N, Fariborzi, H & Younis, MI 2017, Axially modulated clamped-guided arch resonator for memory and logic applications. in 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems. Proceedings of the ASME Design Engineering Technical Conference, vol. 4, American Society of Mechanical Engineers (ASME), ASME 2017 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2017, Cleveland, United States, 08/6/17. https://doi.org/10.1115/DETC2017-68284

Axially modulated clamped-guided arch resonator for memory and logic applications. / Al Hafiz, Md Abdullah; Tella, Sherif; Alcheikh, Nouha et al.
22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems. American Society of Mechanical Engineers (ASME), 2017. (Proceedings of the ASME Design Engineering Technical Conference; Vol. 4).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Axially modulated clamped-guided arch resonator for memory and logic applications

AU - Al Hafiz, Md Abdullah

AU - Tella, Sherif

AU - Alcheikh, Nouha

AU - Fariborzi, Hossein

AU - Younis, Mohammad I.

PY - 2017

Y1 - 2017

N2 - We experimentally demonstrate memory and logic devices based on an axially modulated clamped-guided arch resonator. The device are electrostatically actuated and capacitively sensed, while the resonance frequency modulation is achieved through an axial electrostatic force from the guided side of the clamped-guided arch microbeam. We present two case studies: first, a dynamic memory based on the nonlinear frequency response of the resonator, and second, a reprogrammable two-input logic gate based on the linear frequency modulation of the resonator. These devices show energy cost per memory/logic operation in pJ, are fully compatible with CMOS fabrication processes, have the potential for on-chip system integration, and operate at room temperature.

AB - We experimentally demonstrate memory and logic devices based on an axially modulated clamped-guided arch resonator. The device are electrostatically actuated and capacitively sensed, while the resonance frequency modulation is achieved through an axial electrostatic force from the guided side of the clamped-guided arch microbeam. We present two case studies: first, a dynamic memory based on the nonlinear frequency response of the resonator, and second, a reprogrammable two-input logic gate based on the linear frequency modulation of the resonator. These devices show energy cost per memory/logic operation in pJ, are fully compatible with CMOS fabrication processes, have the potential for on-chip system integration, and operate at room temperature.

KW - Axial stress modulation

KW - Clamped-guided arch resonator

KW - Electromechanical computation

KW - Mechanical memory

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M3 - Conference contribution

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T3 - Proceedings of the ASME Design Engineering Technical Conference

BT - 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems

PB - American Society of Mechanical Engineers (ASME)

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Y2 - 6 August 2017 through 9 August 2017

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Al Hafiz MA, Tella S, Alcheikh N, Fariborzi H, Younis MI. Axially modulated clamped-guided arch resonator for memory and logic applications. In 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems. American Society of Mechanical Engineers (ASME). 2017. (Proceedings of the ASME Design Engineering Technical Conference). doi: 10.1115/DETC2017-68284

Axially modulated clamped-guided arch resonator for memory and logic applications

Abstract

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Bibliographical note

Keywords

ASJC Scopus subject areas

Access to Document

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