Atomistic modeling of the detailed structure of Si/SiO2 interfaces using AIDA-TEM (Ab-initio Interface Defect detection by Analytic Transmission Electron Microscopy)

W. Windl*, T. Liang, S. Lopatin, G. Duscher

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Original languageEnglish (US)
Pages (from-to)826-827
Number of pages2
JournalMicroscopy and Microanalysis
Issue numberSUPPL. 2
StatePublished - 2003
Externally publishedYes

ASJC Scopus subject areas

  • Instrumentation

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