Abstract
We introduce a metrology platform that employs artificial intelligence in hardware through optical metasurfaces. We experimentally demonstrate the measurement of thin film thickness and refractive index maps with nanometer accuracy using this platform.
| Original language | English (US) |
|---|---|
| Title of host publication | 2023 Conference on Lasers and Electro-Optics, CLEO 2023 |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| ISBN (Electronic) | 9781957171258 |
| State | Published - 2023 |
| Event | 2023 Conference on Lasers and Electro-Optics, CLEO 2023 - San Jose, United States Duration: May 7 2023 → May 12 2023 |
Publication series
| Name | 2023 Conference on Lasers and Electro-Optics, CLEO 2023 |
|---|
Conference
| Conference | 2023 Conference on Lasers and Electro-Optics, CLEO 2023 |
|---|---|
| Country/Territory | United States |
| City | San Jose |
| Period | 05/7/23 → 05/12/23 |
Bibliographical note
Publisher Copyright:© Optica Publishing Group 2023.
ASJC Scopus subject areas
- Artificial Intelligence
- Computer Science Applications
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Atomic and Molecular Physics, and Optics