Analytical and Experimental Study of the Dynamics of a Micro-Electromechanical Resonator Based Digital-to-Analog Converter

Wen Zhao; Sally Ahmed; Hossein Fariborzi; Mohammad I. Younis

doi:10.1088/1361-6439/ac3219

Analytical and Experimental Study of the Dynamics of a Micro-Electromechanical Resonator Based Digital-to-Analog Converter

Wen Zhao, Sally Ahmed, Hossein Fariborzi, Mohammad I. Younis

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

In this paper, an analytical model of a micro-electromechanical (MEM) resonator used as a 4-bit digital-to-analog converter (DAC) is presented. First, we derive the dynamic equation of the 4-bit DAC device, and the nonlinear governing equation is solved by the Galerkin method combined with a shooting technique to simulate the static response, linear eigenvalue problem, and forced vibration response of the device for various electrostatic actuation cases. Also, we optimize the air gaps in the linear domain to ensure enhanced performance of the DAC. Further, to analyze the operation of the DAC in the nonlinear regime, two experimental samples powered by -2dBm and -12dBm AC inputs are examined. Forward and backward frequency sweeps are conducted experimentally and analytically. The proposed analytical results are validated by comparison with experimental data. The results indicate that the presented modeling, simulations, and optimization are effective tools for the design of MEM resonator-based circuits. Keywords: Digital to Analog Converter (DAC); MEMS Resonator; Optimization; Nonlinear Dynamics.

Original language	English (US)
Journal	Journal of Micromechanics and Microengineering
DOIs	https://doi.org/10.1088/1361-6439/ac3219
State	Published - Oct 21 2021

Bibliographical note

KAUST Repository Item: Exported on 2021-10-26
Acknowledgements: We acknowledge the financial support from King Abdullah University of Science and Technology, KAUST.

ASJC Scopus subject areas

Mechanics of Materials
Mechanical Engineering
Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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10.1088/1361-6439/ac3219

https://repository.kaust.edu.sa/bitstream/10754/672951/1/Analytical_Zhao%2bet%2bal_2021_J._Micromech._Microeng._10.1088_1361-6439_ac3219.pdf

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@article{ac9cb2806f1d450f8d81d7d856c0eea1,

title = "Analytical and Experimental Study of the Dynamics of a Micro-Electromechanical Resonator Based Digital-to-Analog Converter",

abstract = "In this paper, an analytical model of a micro-electromechanical (MEM) resonator used as a 4-bit digital-to-analog converter (DAC) is presented. First, we derive the dynamic equation of the 4-bit DAC device, and the nonlinear governing equation is solved by the Galerkin method combined with a shooting technique to simulate the static response, linear eigenvalue problem, and forced vibration response of the device for various electrostatic actuation cases. Also, we optimize the air gaps in the linear domain to ensure enhanced performance of the DAC. Further, to analyze the operation of the DAC in the nonlinear regime, two experimental samples powered by -2dBm and -12dBm AC inputs are examined. Forward and backward frequency sweeps are conducted experimentally and analytically. The proposed analytical results are validated by comparison with experimental data. The results indicate that the presented modeling, simulations, and optimization are effective tools for the design of MEM resonator-based circuits. Keywords: Digital to Analog Converter (DAC); MEMS Resonator; Optimization; Nonlinear Dynamics.",

author = "Wen Zhao and Sally Ahmed and Hossein Fariborzi and Younis, {Mohammad I.}",

note = "KAUST Repository Item: Exported on 2021-10-26 Acknowledgements: We acknowledge the financial support from King Abdullah University of Science and Technology, KAUST.",

year = "2021",

month = oct,

day = "21",

doi = "10.1088/1361-6439/ac3219",

language = "English (US)",

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TY - JOUR

T1 - Analytical and Experimental Study of the Dynamics of a Micro-Electromechanical Resonator Based Digital-to-Analog Converter

AU - Zhao, Wen

AU - Ahmed, Sally

AU - Fariborzi, Hossein

AU - Younis, Mohammad I.

N1 - KAUST Repository Item: Exported on 2021-10-26 Acknowledgements: We acknowledge the financial support from King Abdullah University of Science and Technology, KAUST.

PY - 2021/10/21

Y1 - 2021/10/21

N2 - In this paper, an analytical model of a micro-electromechanical (MEM) resonator used as a 4-bit digital-to-analog converter (DAC) is presented. First, we derive the dynamic equation of the 4-bit DAC device, and the nonlinear governing equation is solved by the Galerkin method combined with a shooting technique to simulate the static response, linear eigenvalue problem, and forced vibration response of the device for various electrostatic actuation cases. Also, we optimize the air gaps in the linear domain to ensure enhanced performance of the DAC. Further, to analyze the operation of the DAC in the nonlinear regime, two experimental samples powered by -2dBm and -12dBm AC inputs are examined. Forward and backward frequency sweeps are conducted experimentally and analytically. The proposed analytical results are validated by comparison with experimental data. The results indicate that the presented modeling, simulations, and optimization are effective tools for the design of MEM resonator-based circuits. Keywords: Digital to Analog Converter (DAC); MEMS Resonator; Optimization; Nonlinear Dynamics.

AB - In this paper, an analytical model of a micro-electromechanical (MEM) resonator used as a 4-bit digital-to-analog converter (DAC) is presented. First, we derive the dynamic equation of the 4-bit DAC device, and the nonlinear governing equation is solved by the Galerkin method combined with a shooting technique to simulate the static response, linear eigenvalue problem, and forced vibration response of the device for various electrostatic actuation cases. Also, we optimize the air gaps in the linear domain to ensure enhanced performance of the DAC. Further, to analyze the operation of the DAC in the nonlinear regime, two experimental samples powered by -2dBm and -12dBm AC inputs are examined. Forward and backward frequency sweeps are conducted experimentally and analytically. The proposed analytical results are validated by comparison with experimental data. The results indicate that the presented modeling, simulations, and optimization are effective tools for the design of MEM resonator-based circuits. Keywords: Digital to Analog Converter (DAC); MEMS Resonator; Optimization; Nonlinear Dynamics.

UR - http://hdl.handle.net/10754/672951

UR - https://iopscience.iop.org/article/10.1088/1361-6439/ac3219

U2 - 10.1088/1361-6439/ac3219

DO - 10.1088/1361-6439/ac3219

M3 - Article

SN - 0960-1317

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

ER -

Analytical and Experimental Study of the Dynamics of a Micro-Electromechanical Resonator Based Digital-to-Analog Converter

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