Abstract
This paper reports structural characterization on semipolar GaN films grown on r -plane sapphire substrates by metalorganic vapor-phase epitaxy. The polar orientation of semipolar GaN is assigned that the N -polar plane faces the surface side. The epitaxial relationship of the semipolar GaNr -plane sapphire is determined as [000 1-] GaN [1 2- 13]sapphire and [1 1- 00]GaN [1 1- 0 1-] sapphire. An anomalous phase orthogonal-twisted around the c -axis is revealed by transmission electron microscope, which is almost localized at the surface.
Original language | English (US) |
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Article number | 171912 |
Journal | Applied Physics Letters |
Volume | 92 |
Issue number | 17 |
DOIs | |
State | Published - 2008 |
Externally published | Yes |
Bibliographical note
Funding Information:This work was partially supported by MEXT, HAITEKU (2005).
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)