An Experimental Investigation of the Dynamic Behavior of an In-Plane MEMS Shallow Arch Under Electrostatic Excitation

Abdallah Ramini, Md Abdullah Al Hafiz, Mohammed Lamine Faycal Bellaredj, Qais M. Al Hennawi, Mohammad I. Younis

Research output: Chapter in Book/Report/Conference proceedingConference contribution


We present experimental investigation of the nonlinear dynamics of a clamped-clamped in-plane MEMS shallow arch when excited by an electrostatic force. We explore the dynamic behaviors of the in-plane motion of the shallow arches via frequency sweeps in the neighborhood of the first resonance frequency. The shallow arch response is video microscopy recorded and analyzed by means of digital imaging. The experimental data show local softening behavior for small DC and AC loads. For high voltages, the experimental investigation reveals interesting dynamics, where the arch exhibits a dynamic snap-Through behavior. These attractive experimental results verify the previously reported complex behavior of in-plane MEMS arches and show promising results to implement these structures for variety of sensing and actuation applications. © Copyright 2015 by ASME.
Original languageEnglish (US)
Title of host publicationVolume 4: 20th Design for Manufacturing and the Life Cycle Conference; 9th International Conference on Micro- and Nanosystems
PublisherASME International
ISBN (Print)9780791857113
StatePublished - Jan 20 2016

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