TY - GEN
T1 - An Experimental and Theoretical Investigation of Double Resonance Activation in Electrostatic MEMS Resonators
AU - Hasan, Mohammad H.
AU - Ouakad, Hassen M.
AU - Jaber, Nizar
AU - Hafiz, Md Abdullah Al
AU - Alsaleem, Fadi
AU - Younis, Mohammad I.
N1 - KAUST Repository Item: Exported on 2020-10-01
PY - 2018/11/2
Y1 - 2018/11/2
N2 - Electrostatic micro-electro-mechanical-system (MEMS) devices show great potential in a variety of applications such as sensing and actuation; however, they are hindered by their high input voltage requirement. Double resonance excitation, which activates the system’s mechanical and electrical resonances simultaneously, was recently demonstrated experimentally to alleviate this problem. In this work, we present a mathematical model, based on the Euler Bernoulli beam model coupled with a circuit model, to simulate double resonance in MEMS devices and to shed light more onto the previously published experimental data. We show good agreement between the theoretical simulation and experimental data when the electrical resonance frequency band is sufficiently high.
AB - Electrostatic micro-electro-mechanical-system (MEMS) devices show great potential in a variety of applications such as sensing and actuation; however, they are hindered by their high input voltage requirement. Double resonance excitation, which activates the system’s mechanical and electrical resonances simultaneously, was recently demonstrated experimentally to alleviate this problem. In this work, we present a mathematical model, based on the Euler Bernoulli beam model coupled with a circuit model, to simulate double resonance in MEMS devices and to shed light more onto the previously published experimental data. We show good agreement between the theoretical simulation and experimental data when the electrical resonance frequency band is sufficiently high.
UR - http://hdl.handle.net/10754/630593
UR - http://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?articleid=2713402
UR - http://www.scopus.com/inward/record.url?scp=85056825999&partnerID=8YFLogxK
U2 - 10.1115/detc2018-85887
DO - 10.1115/detc2018-85887
M3 - Conference contribution
SN - 9780791851791
BT - Volume 4: 23rd Design for Manufacturing and the Life Cycle Conference; 12th International Conference on Micro- and Nanosystems
PB - ASME International
ER -