An electrothermally actuated bi-axis scanning micromirror for medical imaging applications

U. Izhar; B. S. Ooi; S. Tatic-Lucic

doi:10.1109/OMEMS.2009.5338599

An electrothermally actuated bi-axis scanning micromirror for medical imaging applications

U. Izhar^*, B. S. Ooi, S. Tatic-Lucic

^*Corresponding author for this work

Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

3 Scopus citations

Abstract

We present the design, fabrication and initial characterization results of a novel electrothermal micromirror. Deflection angle of up to 20° at input power of 14mW with temperature of less than 100°C was observed.

Original language	English (US)
Title of host publication	2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
Pages	53-54
Number of pages	2
DOIs	https://doi.org/10.1109/OMEMS.2009.5338599
State	Published - 2009
Event	2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 - Clearwater, FL, United States Duration: Aug 17 2009 → Aug 20 2009

Publication series

Name	2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009

Other

Other	2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
Country/Territory	United States
City	Clearwater, FL
Period	08/17/09 → 08/20/09

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

Access to Document

10.1109/OMEMS.2009.5338599

Cite this

Izhar, U., Ooi, B. S., & Tatic-Lucic, S. (2009). An electrothermally actuated bi-axis scanning micromirror for medical imaging applications. In 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 (pp. 53-54). Article 5338599 (2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009). https://doi.org/10.1109/OMEMS.2009.5338599

@inproceedings{0116027b90134b2fae9777201ba0b733,

title = "An electrothermally actuated bi-axis scanning micromirror for medical imaging applications",

abstract = "We present the design, fabrication and initial characterization results of a novel electrothermal micromirror. Deflection angle of up to 20° at input power of 14mW with temperature of less than 100°C was observed.",

author = "U. Izhar and Ooi, {B. S.} and S. Tatic-Lucic",

year = "2009",

doi = "10.1109/OMEMS.2009.5338599",

language = "English (US)",

isbn = "9781424423828",

series = "2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009",

pages = "53--54",

booktitle = "2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009",

note = "2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 ; Conference date: 17-08-2009 Through 20-08-2009",

}

Izhar, U, Ooi, BS & Tatic-Lucic, S 2009, An electrothermally actuated bi-axis scanning micromirror for medical imaging applications. in 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009., 5338599, 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009, pp. 53-54, 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009, Clearwater, FL, United States, 08/17/09. https://doi.org/10.1109/OMEMS.2009.5338599

An electrothermally actuated bi-axis scanning micromirror for medical imaging applications. / Izhar, U.; Ooi, B. S.; Tatic-Lucic, S.
2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009. 2009. p. 53-54 5338599 (2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - An electrothermally actuated bi-axis scanning micromirror for medical imaging applications

AU - Izhar, U.

AU - Ooi, B. S.

AU - Tatic-Lucic, S.

PY - 2009

Y1 - 2009

N2 - We present the design, fabrication and initial characterization results of a novel electrothermal micromirror. Deflection angle of up to 20° at input power of 14mW with temperature of less than 100°C was observed.

AB - We present the design, fabrication and initial characterization results of a novel electrothermal micromirror. Deflection angle of up to 20° at input power of 14mW with temperature of less than 100°C was observed.

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U2 - 10.1109/OMEMS.2009.5338599

DO - 10.1109/OMEMS.2009.5338599

M3 - Conference contribution

AN - SCOPUS:71849115416

SN - 9781424423828

T3 - 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009

SP - 53

EP - 54

BT - 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009

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Y2 - 17 August 2009 through 20 August 2009

ER -

An electrothermally actuated bi-axis scanning micromirror for medical imaging applications

Abstract

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Other

ASJC Scopus subject areas

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