An effective fabrication method for ultra thin aluminum structures

Engineering

• Fabrication Method 100%
• Aluminum Structure 100%
• Nanomaterial 50%
• Aluminum Film 50%
• Probe Point 50%
• Mean Free Path 50%
• Grain Boundary 50%

Keyphrases

• Aluminium Structures 100%
• Effective Procedure 50%
• Film Resistivity 50%
• Thick Structure 50%
• Aluminum Film 50%
• 4-point 50%
• Sub-100 Nm 50%

Material Science

• Electrical Resistivity 100%
• Film Thickness 50%
• Wet Etching 50%
• Nanocrystalline Material 50%
• Metal Film 50%
• Grain Boundary 50%