AlGaN-based vertical injection laser diodes using inverse tapered p-waveguide for efficient hole transport

Md Mahbub Satter, Zachary Lochner, Tsung Ting Kao, Yuh Shiuan Liu, Xiao Hang Li, Shyh Chiang Shen, Russell D. Dupuis, P. D. Yoder

Research output: Contribution to journalArticlepeer-review

15 Scopus citations


An AlGaN deep ultraviolet laser diode design exploiting AlN substrates is presented, featuring an inverse-tapered p-waveguide layer. The 2-D optoelectronic simulation predicts lasing at 290 nm. Spatial balancing of the lasing mode to minimize optical loss in the p-Ohmic metallization is achieved through the use of a narrow bandgap yet transparent n-waveguide layer. Several electron blocking layer (EBL) designs are investigated and compared with a conventionally tapered EBL design. Through judicious volumetric redistribution of fixed negative polarization charge, inverse tapering may be exploited to achieve nearly flat valence band profiles free from barriers to hole injection into the active region, in contrast to conventional designs. Furthermore, proper selection of quantum well barrier and spacer compositions are demonstrated to reduce electron leakage from the active region. Numerical simulations demonstrate that the inverse tapered strategy is a viable solution for efficient hole injection in deep ultraviolet laser diodes operating at shorter wavelengths (<290 nm).

Original languageEnglish (US)
Article number6716982
Pages (from-to)166-173
Number of pages8
JournalIEEE Journal of Quantum Electronics
Issue number3
StatePublished - Mar 2014
Externally publishedYes


  • AlGaN epitaxial layer
  • AlN substrate
  • deep ultraviolet laser diodes
  • efficient hole transport
  • hole blocking layer
  • inverse tapering
  • optical absorption loss
  • polarization charge

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering


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