Accurate Sensorless Multistable Microsystem With a Single Actuator

Hussein Hussein*, Hossein Fariborzi*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

1 Scopus citations

Abstract

A compact and monolithic multistable microsystem was developed to realize the accurate positioning on the microscale by using a single actuator, without any positioning sensors. The mobile part can be maintained in several stable positions at rest with accurate intermediate steps and a high stability margin at each position. Switching between stable positions can be performed in both directions on one axis by using a single actuator. Using the mechanical intelligence encoded in the internal mechanisms, the mobile part position can be switched one step forward or back to the initial position through a single activation of the actuator. Multistable devices were designed and fabricated based on the working principle, and their satisfactory operation, with effective holding at stable positions and switching in two directions, was experimentally demonstrated.

Original languageEnglish (US)
Article number825470
JournalFrontiers in Mechanical Engineering
Volume8
DOIs
StatePublished - Feb 11 2022

Bibliographical note

Publisher Copyright:
Copyright © 2022 Hussein and Fariborzi.

Keywords

  • actuator
  • MEMS
  • micropositioner
  • miniaturization
  • multistable

ASJC Scopus subject areas

  • General Materials Science
  • Mechanical Engineering
  • Computer Science Applications
  • Industrial and Manufacturing Engineering

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