A thermally responsive polymer microvalve without mechanical parts photo-patterned in a parylene channel

S. Mutlu; Cong Yu; F. Svec; C. H. Mastrangelo; J. M.J. Fréchet; Y. B. Gianchandani

doi:10.1109/SENSOR.2003.1215595

A thermally responsive polymer microvalve without mechanical parts photo-patterned in a parylene channel

S. Mutlu, Cong Yu, F. Svec, C. H. Mastrangelo, J. M.J. Fréchet, Y. B. Gianchandani

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

15 Scopus citations

Abstract

A photoresist-like thermally responsive polymer has been formulated, surface micromachined and integrated into parylene microchannels to realize an inline valve. The polymer physically swells below its lower critical solution temperature and shrinks above it. Test showed a 2.5-fold polymer volume increase by changing water temperature from 25 to 10°C. Repeated polymer swelling and shrinking were observed inside the channel with a system response time around 7 s. Pressure build-up measurements were used to demonstrate the functionality of the valve. Valve test results using DI water showed that the pressure upstream of the polymer plug increased from 15.3 to 20.3 psi with temperature change from 36°C to 15°C.

Original language	English (US)
Title of host publication	TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	802-805
Number of pages	4
ISBN (Electronic)	0780377311, 9780780377318
DOIs	https://doi.org/10.1109/SENSOR.2003.1215595
State	Published - 2003
Externally published	Yes
Event	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States Duration: Jun 8 2003 → Jun 12 2003

Publication series

Name	TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume	1

Other

Other	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
Country/Territory	United States
City	Boston
Period	06/8/03 → 06/12/03

Bibliographical note

Publisher Copyright:
© 2003 IEEE.

Keywords

Casting
Coatings
Fabrication
Microchannel
Microvalves
Polymer films
Temperature sensors
Thin film sensors
Valves
Viscosity

ASJC Scopus subject areas

Electrical and Electronic Engineering

Access to Document

10.1109/SENSOR.2003.1215595

Cite this

Mutlu, S., Yu, C., Svec, F., Mastrangelo, C. H., Fréchet, J. M. J., & Gianchandani, Y. B. (2003). A thermally responsive polymer microvalve without mechanical parts photo-patterned in a parylene channel. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers (pp. 802-805). Article 1215595 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 1). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSOR.2003.1215595

Mutlu, S. ; Yu, Cong ; Svec, F. et al. / A thermally responsive polymer microvalve without mechanical parts photo-patterned in a parylene channel. TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2003. pp. 802-805 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers).

@inproceedings{375f052b875841bcb771a637df786476,

title = "A thermally responsive polymer microvalve without mechanical parts photo-patterned in a parylene channel",

abstract = "A photoresist-like thermally responsive polymer has been formulated, surface micromachined and integrated into parylene microchannels to realize an inline valve. The polymer physically swells below its lower critical solution temperature and shrinks above it. Test showed a 2.5-fold polymer volume increase by changing water temperature from 25 to 10°C. Repeated polymer swelling and shrinking were observed inside the channel with a system response time around 7 s. Pressure build-up measurements were used to demonstrate the functionality of the valve. Valve test results using DI water showed that the pressure upstream of the polymer plug increased from 15.3 to 20.3 psi with temperature change from 36°C to 15°C.",

keywords = "Casting, Coatings, Fabrication, Microchannel, Microvalves, Polymer films, Temperature sensors, Thin film sensors, Valves, Viscosity",

author = "S. Mutlu and Cong Yu and F. Svec and Mastrangelo, {C. H.} and Fr{\'e}chet, {J. M.J.} and Gianchandani, {Y. B.}",

note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers ; Conference date: 08-06-2003 Through 12-06-2003",

year = "2003",

doi = "10.1109/SENSOR.2003.1215595",

language = "English (US)",

series = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "802--805",

booktitle = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",

address = "United States",

}

Mutlu, S, Yu, C, Svec, F, Mastrangelo, CH, Fréchet, JMJ & Gianchandani, YB 2003, A thermally responsive polymer microvalve without mechanical parts photo-patterned in a parylene channel. in TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers., 1215595, TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers, vol. 1, Institute of Electrical and Electronics Engineers Inc., pp. 802-805, 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers, Boston, United States, 06/8/03. https://doi.org/10.1109/SENSOR.2003.1215595

A thermally responsive polymer microvalve without mechanical parts photo-patterned in a parylene channel. / Mutlu, S.; Yu, Cong; Svec, F. et al.
TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2003. p. 802-805 1215595 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - A thermally responsive polymer microvalve without mechanical parts photo-patterned in a parylene channel

AU - Mutlu, S.

AU - Yu, Cong

AU - Svec, F.

AU - Mastrangelo, C. H.

AU - Fréchet, J. M.J.

AU - Gianchandani, Y. B.

PY - 2003

Y1 - 2003

N2 - A photoresist-like thermally responsive polymer has been formulated, surface micromachined and integrated into parylene microchannels to realize an inline valve. The polymer physically swells below its lower critical solution temperature and shrinks above it. Test showed a 2.5-fold polymer volume increase by changing water temperature from 25 to 10°C. Repeated polymer swelling and shrinking were observed inside the channel with a system response time around 7 s. Pressure build-up measurements were used to demonstrate the functionality of the valve. Valve test results using DI water showed that the pressure upstream of the polymer plug increased from 15.3 to 20.3 psi with temperature change from 36°C to 15°C.

AB - A photoresist-like thermally responsive polymer has been formulated, surface micromachined and integrated into parylene microchannels to realize an inline valve. The polymer physically swells below its lower critical solution temperature and shrinks above it. Test showed a 2.5-fold polymer volume increase by changing water temperature from 25 to 10°C. Repeated polymer swelling and shrinking were observed inside the channel with a system response time around 7 s. Pressure build-up measurements were used to demonstrate the functionality of the valve. Valve test results using DI water showed that the pressure upstream of the polymer plug increased from 15.3 to 20.3 psi with temperature change from 36°C to 15°C.

KW - Casting

KW - Coatings

KW - Fabrication

KW - Microchannel

KW - Microvalves

KW - Polymer films

KW - Temperature sensors

KW - Thin film sensors

KW - Valves

KW - Viscosity

UR - http://www.scopus.com/inward/record.url?scp=77955423319&partnerID=8YFLogxK

U2 - 10.1109/SENSOR.2003.1215595

DO - 10.1109/SENSOR.2003.1215595

M3 - Conference contribution

AN - SCOPUS:77955423319

T3 - TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

SP - 802

EP - 805

BT - TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers

Y2 - 8 June 2003 through 12 June 2003

ER -

Mutlu S, Yu C, Svec F, Mastrangelo CH, Fréchet JMJ, Gianchandani YB. A thermally responsive polymer microvalve without mechanical parts photo-patterned in a parylene channel. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc. 2003. p. 802-805. 1215595. (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers). doi: 10.1109/SENSOR.2003.1215595

A thermally responsive polymer microvalve without mechanical parts photo-patterned in a parylene channel

Abstract

Publication series

Other

Bibliographical note

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this