Abstract
Pulsed laser irradiation is one of the promising techniques in quantum well intermixing. Here, we report the development of a theoretical model to characterize the process with respect to various parameters. The model estimates the maximum bandgap shift and the effect of process parameters such as exposure time and irradiation energy. The calculation results appear to be in good agreement with the experimental results. The experimental data were obtained from a set of InGaAs/InGaAsP quantum well laser structures using a Q-switched Nd:YAG laser emitting at 1.064 μm. The model serves as a good simulation program to optimize this process for the fabrication of photonic integrated circuits.
Original language | English (US) |
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Pages (from-to) | 116-121 |
Number of pages | 6 |
Journal | Surface and Coatings Technology |
Volume | 130 |
Issue number | 1 |
DOIs | |
State | Published - Aug 1 2000 |
Externally published | Yes |
Keywords
- InGaAs/InGaAsP
- Photonics integration
- Pulsed-photoabsorption technique
- Quantum well intermixing
ASJC Scopus subject areas
- General Chemistry
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry