A superhydrophobic chip based on SU-8 photoresist pillars suspended on a silicon nitride membrane

Giovanni Marinaro, Angelo Accardo, Francesco De Angelis, Thomas Dane, Britta Weinhausen, Manfred Burghammer, Christian Riekel

Research output: Contribution to journalArticlepeer-review

20 Scopus citations


We developed a new generation of superhydrophobic chips optimized for probing ultrasmall sample quantities by X-ray scattering and fluorescence techniques. The chips are based on thin Si3N4 membranes with a tailored pattern of SU-8 photoresist pillars. Indeed, aqueous solution droplets can be evaporated and concentrated at predefined positions using a non-periodic pillar pattern. We demonstrated quantitatively the deposition and aggregation of gold glyconanoparticles from the evaporation of a nanomolar droplet in a small spot by raster X-ray nanofluorescence. Further, raster nanocrystallography of biological objects such as rod-like tobacco mosaic virus nanoparticles reveals crystalline macro-domain formation composed of highly oriented nanorods. © 2014 the Partner Organisations.
Original languageEnglish (US)
Pages (from-to)3705-3709
Number of pages5
JournalLab on a Chip
Issue number19
StatePublished - 2014
Externally publishedYes

Bibliographical note

KAUST Repository Item: Exported on 2020-10-01
Acknowledgements: We wish to thank F. Gentile (IIT-Genova) and E. Di Fabrizio(KAUST) for very helpful suggestions in the context of thecurrent work. We also thank J. L. Pellequer (CEA Marcoule(IBEB, Service de Biochimie et Toxicologie Nucléaire, Bagnolssur Cèze, France)) for the gift of the TMV particle solutionand M. Reynolds (ESRF) for the gold nanoparticle solution.I. Snigireva (ESRF Imaging Laboratory) collected the gold nanoparticleresidue SEM image. All other SEM images wererecorded at IIT-Genova.
This publication acknowledges KAUST support, but has no KAUST affiliated authors.


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