A superhydrophobic chip based on SU-8 photoresist pillars suspended on a silicon nitride membrane

Giovanni Marinaro, Angelo Accardo, Francesco De Angelis, Thomas Dane, Britta Weinhausen, Manfred Burghammer, Christian Riekel

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17 Scopus citations


We developed a new generation of superhydrophobic chips optimized for probing ultrasmall sample quantities by X-ray scattering and fluorescence techniques. The chips are based on thin Si3N4 membranes with a tailored pattern of SU-8 photoresist pillars. Indeed, aqueous solution droplets can be evaporated and concentrated at predefined positions using a non-periodic pillar pattern. We demonstrated quantitatively the deposition and aggregation of gold glyconanoparticles from the evaporation of a nanomolar droplet in a small spot by raster X-ray nanofluorescence. Further, raster nanocrystallography of biological objects such as rod-like tobacco mosaic virus nanoparticles reveals crystalline macro-domain formation composed of highly oriented nanorods. © 2014 the Partner Organisations.
Original languageEnglish (US)
Pages (from-to)3705-3709
Number of pages5
JournalLab on a Chip
Issue number19
StatePublished - 2014
Externally publishedYes

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