A study of interface and adhesion of c-BN film on Si(1 0 0) modified by nitrogen plasma based ion implantation technique

Jingze Tian*, Qing Zhang, Lifang Xia, S. F. Yoon, J. Ahn, E. S. Byon, Q. Zhou, S. G. Wang, J. Q. Li, D. J. Yang

*Corresponding author for this work

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Engineering