A simple method for fabricating multi-layer PDMS structures for 3D microfluidic chips

Mengying Zhang, Jinbo Wu, Limu Wang, Kang Xiao, Weijia Wen

Research output: Contribution to journalArticlepeer-review

175 Scopus citations


We report a simple methodology to fabricate PDMS multi-layer microfluidic chips. A PDMS slab was surface-treated by trichloro (1H,1H,2H,2H-perfluorooctyl) silane, and acts as a reusable transferring layer. Uniformity of the thickness of the patterned PDMS layer and the well-alignment could be achieved due to the transparency and proper flexibility of this transferring layer. Surface treatment results are confirmed by XPS and contact angle testing, while bonding forces between different layers were measured for better understanding of the transferring process. We have also designed and fabricated a few simple types of 3D PDMS chip, especially one consisting of 6 thin layers (each with thickness of 50 μm), to demonstrate the potential utilization of this technique. 3D fluorescence images were taken by a confocal microscope to illustrate the spatial characters of essential parts. This fabrication method is confirmed to be fast, simple, repeatable, low cost and possible to be mechanized for mass production. © The Royal Society of Chemistry 2010.
Original languageEnglish (US)
Pages (from-to)1199
JournalLab on a Chip
Issue number9
StatePublished - 2010

Bibliographical note

KAUST Repository Item: Exported on 2020-10-01
Acknowledged KAUST grant number(s): SA-C0040, UK-C0016
Acknowledgements: This publication is based on work partially supported by Award No. SA-C0040/UK-C0016, made by King Abdullah University of Science and Technology (KAUST), Hong Kong RGC grants HKUST 603608. The work was also partially supported by the Nanoscience and Nanotechnology Program at HKUST. The authors would like to thank Dr Jiaxing Li and Mr Xiuqing Gong, who gave some help and good suggestion in material choosing, characterization and analyse.
This publication acknowledges KAUST support, but has no KAUST affiliated authors.


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