A Microbeam Resonator with Partial Electrodes for Logic and Memory Elements

Md Abdullah Al Hafiz, Saad Ilyas, Sally Ahmed, Mohammad I. Younis, Hossein Fariborzi

Research output: Contribution to journalArticlepeer-review

12 Scopus citations


We demonstrate logic and memory elements based on an in-plane clamped-clamped microbeam resonator. The micro-resonator is electrostatically actuated through a drive electrode and the motional signal is capacitively sensed at a sense electrode, while the resonance characteristics are modulated by DC voltage pulses provided at two separate partial electrodes, independent of the drive/sense electrodes. For the logic applications, we use two separate electrodes to provide DC voltages defined as the logic inputs. The high (low) motional signal at on-resonance (off-resonance) state is defined as the logic output state “1” (“0”). For the memory operation, two stable vibrational states, high and low, within the hysteretic regime are defined as the memory states, “1” and “0”, respectively. We take advantage of the split electrode configuration to provide positive and negative DC voltage pulses selectively to set/reset the memory states (“1”/“0”) without affecting the driving and sensing terminals. Excluding the energy cost for supporting electronics, these devices consume energy in 10’s of picojoules per logic/memory operations. Furthermore, the devices are fabricated using silicon on insulator (SOI) wafers, have the potential for on-chip integration, and operate at moderate pressure (~1 Torr) and room temperature.
Original languageEnglish (US)
Pages (from-to)83-92
Number of pages10
JournalIEEE Journal on Exploratory Solid-State Computational Devices and Circuits
StatePublished - Nov 10 2017

Bibliographical note

KAUST Repository Item: Exported on 2020-10-01
Acknowledged KAUST grant number(s): OSR-2016-CRG5-3001
Acknowledgements: This work was supported by King Abdullah University of Science and Technology (KAUST) office of sponsored research (OSR) under Award No. OSR-2016-CRG5-3001.


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