A Micro-Resonator-Based Programmable Hysteresis Comparator

Xuecui Zou, Sally Ahmed, Hossein Fariborzi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

In this work, the design and experimental results of a micro-electro-mechanical resonator-based programmable hysteresis comparator are presented. The resonator-based hysteresis comparator consists of a doubly-clamped micro-beam and side electrodes. The hysteresis comparator is implemented using the bifurcation characteristic of the resonator vibration. The comparator input, which is a dc voltage applied on a side electrode, modulates the nonlinearity of the resonator's output. The comparator is designed such that the resonator's drive frequency determines the hysteresis window size. Experimental results are obtained to verify the hysteresis programmability of the hysteresis comparator. This resonator-based comparator shows stable electrical properties and demonstrates high durability due to the non-contact operation. The hysteresis comparator has a wide tuning range and consumes ultra-low off-state current which opens up new possibilities for the internet of things and biomedical applications that need low power consumption.
Original languageEnglish (US)
Title of host publication2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)
PublisherIEEE
Pages483-486
Number of pages4
ISBN (Print)9781665409117
DOIs
StatePublished - Jan 9 2022

Bibliographical note

KAUST Repository Item: Exported on 2022-03-24

Fingerprint

Dive into the research topics of 'A Micro-Resonator-Based Programmable Hysteresis Comparator'. Together they form a unique fingerprint.

Cite this