A MEMS coupled resonator for frequency filtering in air

Engineering

• Fabrication 100%
• Design 100%
• Microelectromechanical System 100%
• Filtration 100%
• Harmonic Excitation 50%
• Bandpass Filter 50%
• Flat Response 50%
• Excitation Frequency 50%
• Surface Micro-Machining 50%
• Output Response 50%
• Band Filter 50%
• Demonstrates 50%
• Applications 50%
• Couplings 50%
• Low Frequency 50%