A MEMS coupled resonator for frequency filtering in air

Saad Ilyas, Nizar Jaber, Mohammad I. Younis

Research output: Contribution to journalArticlepeer-review

4 Scopus citations


We present design, fabrication, and characterization of a mechanically coupled MEMS H resonator capable of performing simultaneous mechanical amplification and filtering in air. The device comprises of two doubly clamped polyimide microbeams joined through the middle by a coupling beam of the same size. The resonator is fabricated via a multi-layer surface micromachining process. A special fabrication process and device design is employed to enable operation in air and to achieve mechanical amplification of the output response. Moreover, mixed-frequency excitation is used to demonstrate a tunable wide band filter for low frequency applications. It is demonstrated that through the multi-source harmonic excitation and the operation in air, an improved band-pass filter with flat response and minimal ripples can be achieved.
Original languageEnglish (US)
Pages (from-to)261-267
Number of pages7
StatePublished - Feb 3 2018


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