A MEMS coupled resonator for frequency filtering in air

Saad Ilyas, Nizar Jaber, Mohammad I. Younis*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

6 Scopus citations


We present design, fabrication, and characterization of a mechanically coupled MEMS H resonator capable of performing simultaneous mechanical amplification and filtering in air. The device comprises of two doubly clamped polyimide microbeams joined through the middle by a coupling beam of the same size. The resonator is fabricated via a multi-layer surface micromachining process. A special fabrication process and device design is employed to enable operation in air and to achieve mechanical amplification of the output response. Moreover, mixed-frequency excitation is used to demonstrate a tunable wide band filter for low frequency applications. It is demonstrated that through the multi-source harmonic excitation and the operation in air, an improved band-pass filter with flat response and minimal ripples can be achieved.

Original languageEnglish (US)
Pages (from-to)261-267
Number of pages7
StatePublished - Dec 2018

Bibliographical note

Publisher Copyright:
© 2018 Elsevier Ltd


  • Clamped–clamped beam
  • Coupled resonator
  • Filter
  • Mixed-source excitation
  • Squeeze film damping
  • Surface micromachining

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Computer Science Applications


Dive into the research topics of 'A MEMS coupled resonator for frequency filtering in air'. Together they form a unique fingerprint.

Cite this