Abstract
We present design, fabrication, and characterization of a mechanically coupled MEMS H resonator capable of performing simultaneous mechanical amplification and filtering in air. The device comprises of two doubly clamped polyimide microbeams joined through the middle by a coupling beam of the same size. The resonator is fabricated via a multi-layer surface micromachining process. A special fabrication process and device design is employed to enable operation in air and to achieve mechanical amplification of the output response. Moreover, mixed-frequency excitation is used to demonstrate a tunable wide band filter for low frequency applications. It is demonstrated that through the multi-source harmonic excitation and the operation in air, an improved band-pass filter with flat response and minimal ripples can be achieved.
Original language | English (US) |
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Pages (from-to) | 261-267 |
Number of pages | 7 |
Journal | Mechatronics |
Volume | 56 |
DOIs | |
State | Published - Dec 2018 |
Bibliographical note
Publisher Copyright:© 2018 Elsevier Ltd
Keywords
- Clamped–clamped beam
- Coupled resonator
- Filter
- Mixed-source excitation
- Squeeze film damping
- Surface micromachining
ASJC Scopus subject areas
- Mechanical Engineering
- Electrical and Electronic Engineering
- Computer Science Applications