A Mechanical Memory With Capacitance Modulation of Nonlinear Resonance

We introduce a novel and straightforward technique for modulating the nonlinear dynamics of a micro-beam by utilizing multiple structural capacitances developed through I/O electrode configurations. Our findings show that the capacitive modulation technique significantly enhances the nonlinear motion of the resonator. By exciting one or more capacitance paths with the same input AC signals, the nonlinear resonance can be actuated, leading to effective modulation of the nonlinear frequency region. The results show that the nonlinear resonance characteristics with capacitance modulation enable two controllable states observed at the resonator output, facilitating memory operations with unified input and output waveforms. In the experiment, we demonstrate that by switching (on/off) capacitance paths, the nonlinear resonance can be effectively modulated, resulting in a clear transition between memory states. The paradigm demonstrated in this study utilizes structural capacitance modulation, providing an energy-efficient and straightforward solution for mechanical memory designs, while also making it easier to be manufactured and integrated into electronic systems.