A Low Power Micro-Electromechanical Resonator-Based Digital to Analog Converter

Sally Ahmed, xuecui zou, Nizar Jaber, Mohammad I. Younis, Hossein Fariborzi

Research output: Contribution to journalArticlepeer-review

9 Scopus citations


We present a novel design of a low-power micro-electro-mechanical digital to analog converter (DAC) based on a clamped-clamped micro-beam resonator with multiple split electrodes and capacitive airgaps of various widths. The proposed n-bit DAC device operates at a single drive frequency and can access one of 2^n distinct stable states based on the applied digital combination. The digital inputs (binary numbers) modulate the beam resonance frequency using the electrostatic softening effect, where the larger binary numbers result in higher beam resonance frequency. Although the tested device consumes 151 pJ per conversion step with a conversion rate of 0.64 kHz, we show that by moderate downscaling of the device dimensions, femto-joules energy consumption and MHz conversion rates are attainable. [2019-0264]
Original languageEnglish (US)
Pages (from-to)1-9
Number of pages9
JournalJournal of Microelectromechanical Systems
StatePublished - Apr 30 2020

Bibliographical note

KAUST Repository Item: Exported on 2020-10-01


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